Key Features
- Real-Time Monitoring: Tracks vibration, temperature, pressure, and acoustic signatures across wafer tools and facility systems.
- AI-Powered Analytics: Machine learning algorithms detect early fault patterns, enabling proactive intervention.
- Downtime Reduction: Predicts component wear-out and schedules maintenance during planned tool idling, minimizing production loss.
- Integrated Data Platform: Seamlessly connects with MES, BMS, and tool controllers for fab-wide visibility.
- Cost & Yield Benefits: Reduces maintenance overhead, extends equipment life, and ensures consistent wafer yield.
- Scalable Architecture: Applicable across lithography, etch, deposition, metrology, and utilities equipment.
Value Proposition
The Predictive Maintenance System transforms fab reliability by shifting from reactive fixes to proactive prevention. With actionable insights and optimized scheduling, it empowers semiconductor manufacturers to achieve higher uptime, lower costs, and improved process stability.
