Build Local Loop for CDS (Chemical Dispense System ), SDS (Slurry Dispense System)
Local Loop Slurry and Chemical supply System with mixing and blending System.
Key Features
- Highly reliable mixing program algorithm
- Control with HMI and PLC controller for Selection of the ratio DI water, Chemical, Slurry and H2O2
- Buzzer sound for low level warning
- Highly reliable Weight machine (Load Cell) for programmable small batch size flexibility
- Level sensors, Leakage sensors
- Exhaust hole
- Chemical, Slurry and DI water Leak Sensor
- Tool stopped when EMO triggered
- Movable for easy relocating
- Suitable for Qualification of chemical and Slurry
Specifications
| PARAMETER | CAPABILITY |
|---|---|
| Application | Chemical (TMAH, H2O2, H3PO4, etc.) |
| Flow Path Configurations | 1″, 1/2″, 3/8″ |
| Flow Rate | 24 L/min |
| Cabinet Materials | PP white material, Fire Proof PP (Customized Design) |
| Drum Size (Raw Supply) | 200L |
| Tank Size (Mixing) | 40L to 150L |
| Component Materials | Air Valves, Diaphragm Pumps, Pulse Dampeners, Tubing, Fittings, Tanks, Drum |
Build Global Loop for CDS (Chemical Dispense System ), SDS (Slurry Dispense System)
Global Loop Slurry and Chemical supply System with mixing and blending Features.
✔supports from 200L up to 1000L mixing capacity with user desired Chemical, Slurry, H2O2 ratio.
Key Features
- Control with HMI and PLC controller for Selection of the ratio of DI water, Chemical, Slurry and H2O2
- Air valves in VMB Box to top-up the chemical with Flexi I/O system
- Level sensor with warning buzzer
- Weight machine (Load Cell) for programmable small batch size flexibility
- Leakage sensors
- PH meter Concentration meter (Optional)
- Exhaust hole
- Chemical, Slurry and DI water Leak Sensor
- Primary Pump (Top up Pump), Secondary Pump (Loop pump) Data logs and pressure for Loop status
Specifications
| PARAMETER | CAPABILITY |
|---|---|
| Application | Chemical (TMAH, H2O2, H3PO4, etc.) |
| Flow Path Configurations | 1″, 1/2″, 3/8″ |
| Flow Rate | 80 L/min |
| Cabinet Materials | PP white material, Fire Proof PP (Customized Design) |
| Drum Size (Raw Supply) | 200L |
| Day Tank Size | 200L to 1000L |
| Component Materials | Air Valves, Diaphragm Pumps, Levitronix Pump, Electrical Air Valves, Tubing, Fittings, Tanks, Drum |