Key Features
- Environmental Precision: Monitors and regulates cleanroom parameters such as temperature, humidity, pressure differentials, and airflow with sub-micron accuracy.
- Utility Integration: Centralized control of HVAC, chilled water, exhaust, compressed air, and specialty gases tailored for fab environments.
- Redundancy & Reliability: High-availability architecture with failover protocols to eliminate single points of failure.
- Energy Optimization: Real-time analytics and AI-driven load balancing to minimize power and utility costs without compromising fab performance.
- Regulatory Compliance: Automated monitoring and reporting aligned with SEMI standards, safety codes, and sustainability norms.
- Secure Connectivity: OPC-UA and BACnet protocols with robust cybersecurity for seamless integration into fab-wide Industry 4.0 ecosystems.
Value Proposition
The BMS for Semiconductors acts as the central nervous system of a fab, ensuring uninterrupted operations, optimal energy usage, and process stability. By delivering real-time visibility and control across all critical infrastructure, it enhances uptime, reduces operational costs, and safeguards wafer yields in a highly competitive industry.
